SFM Medical Digital Flow Meters

Sensirion SFM Medical Digital Flow Meters are designed to measure the flow rate of air, oxygen, and other non-aggressive gases with excellent accuracy. These flow meters offer a low-pressure drop with a small dead space. Sensirion SFM Medical Digital Flow Meters deliver ultra-fast update times with high sensitivity. These flow meters offer a bidirectional flow range of -100 standard liters per minute (SLM) to ±250SLM. They feature medical cones for pneumatic connection to standard breathing circuits and a mechanical interface for easy and reliable electrical reconnections. These meters are based on CMOSens® technology, which combines a thermal sensor element, signal processing, and digital calibration on a single microchip for fast signal processing. SFM meters are specifically designed for medical applications such as respiratory, ventilation, anesthesia, and metabolic instruments.

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Qty. RoHS ECAD Model Type
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For Use With
Range
Accuracy
Output Voltage
Operation Mode
Operating Supply Voltage
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Sensirion Flow Sensors 250 slm, Bidirectional Digital Flow Meter designed for Medical Applications - Disposable Single Use Version
Datasheet
1,698In Stock
Min.: 1
Mult.: 1

Air Flow Sensor Air, Oxygen, Non-Aggressive Gases +/- 250 slm 7 % Bidirectional 5 V Plastic
Sensirion Flow Sensors Digital Mass Flow Meter for O2, 0-20 slm, Legris
Datasheet
15In Stock
Min.: 1
Mult.: 1

Gas Flow Meter Oxygen 20 L/min 3 % Bidirectional 3.5 V to 9 V Stainless Steel
Sensirion Flow Sensors
Datasheet
26In Stock
30Expected 9/30/2026
Min.: 1
Mult.: 1

Mass Flow Meter Gas Air, AR, CO2, N2, N2O, O2 2 slm to 50 slm 2 % 24 V 6 mm Stainless Steel
Sensirion Flow Sensors
Datasheet
4In Stock
Min.: 1
Mult.: 1

Mass Flow Meter Gas Air, AR, CO2, N2, N2O, O2 2 slm to 50 slm 2 % 24 V 6 mm Stainless Steel
Sensirion Flow Sensors Digital (Mass) Flow Meter with range of -30slm to +300slm
Datasheet
38In Stock
Min.: 1
Mult.: 1

Digital Mass Flow Meter Flow Meter Air, Oxygen - 30 slm to 300 slm 2.5 % Bidirectional 3.3 V 19.8 mm Polyphenylene Ether (PPE)
Sensirion Flow Sensors Digital Airflow sensor
Datasheet
12In Stock
Min.: 1
Mult.: 1

Air Flow Sensor Digital Flow Meter Air, Oxygen, Non-Aggressive Gases - 100 slm to 250 slm 7 % Bidirectional 5 V 26 mm Plastic
Sensirion Flow Sensors -100 slm to +250 slm (bi-directional)Digital Flow Meter designed for Medical Applications - Autoclavable & cleanable Version
Datasheet
14In Stock
Min.: 1
Mult.: 1

Air Flow Sensor Air, Oxygen, Non-Aggressive Gases - 100 slm to 250 slm 7 % Bidirectional 5 V Plastic
Sensirion Flow Sensors Sensor device
Datasheet
39In Stock
Min.: 1
Mult.: 1

Mass Flow Meter Air, Non-Aggressive Gases 20 slm 3 % Bidirectional 5 V to 9 V 6.25 mm Polyamide (PA)
Sensirion Flow Sensors Digital Mass Flow Meter for CO2, 0-20 slm, Legris
Datasheet
23In Stock
Min.: 1
Mult.: 1

Gas Flow Meter Carbon Dioxide 20 L/min 3 % Bidirectional 3.5 V to 9 V Stainless Steel
Sensirion Flow Sensors Digital Multigas Mass Flow Meter with exchangeable connectors (6 mm Legris included). Measurement range: 0.5 slm - 0.0005 slm.
Datasheet
2In Stock
Min.: 1
Mult.: 1

Mass Flow Meter Flow Meter Gases 0.5 slm 0.8 % Bidirectional 15 V to 26.4 V Aluminum
Sensirion Flow Sensors Digital Multigas Mass Flow Meter with exchangeable connectors (6 mm Legris included). Measurement range: 50 sccm - 0.05 sccm.
Datasheet
4In Stock
Min.: 1
Mult.: 1

Mass Flow Meter Flow Meter Gases 50 slm 0.8 % Bidirectional 15 V to 26.4 V Aluminum
Sensirion Flow Sensors Digital (Mass) Flow Meter with range of -150slm to +300slm
Datasheet
33In Stock
Min.: 1
Mult.: 1

Digital Mass Flow Meter Flow Meter Air, Oxygen -150 slm to 300 slm 2.5 % Bidirectional 3.3 V 19.8 mm Polyphenylene Ether (PPE)
Sensirion Flow Sensors Digital Airflow sensor
Datasheet
Product Comments
15In Stock
20Expected 12/16/2026
Min.: 1
Mult.: 1

Digital Flow Meter Digital Mass Flow Meter Air, Oxygen -10 slm to 240 slm 3 % Unidirectional 2.7 V to 5.5 V Polyphenylene Ether (PPE)
Sensirion Flow Sensors Digital (Mass) Flow Meter with range of -10slm to +240slm
Datasheet
26In Stock
90On Order
Min.: 1
Mult.: 1

Low Pressure Drop Digital Flow Meter Digital Flow Meter Air, Oxygen, Non-Aggressive Gases - 10 slm to 240 slm 2.5 % Bidirectional 3.3 V 19 mm Polyphenylene Ether (PPE)
Sensirion Flow Sensors 250 slm, Bidirectional Digital Flow Meter designed for Medical Applications - Autoclavable & cleanable Version
Datasheet
49In Stock
Min.: 1
Mult.: 1

Air Flow Sensor Air, Oxygen, Non-Aggressive Gases +/- 250 slm 7 % Bidirectional 5 V Plastic
Sensirion Flow Sensors Singe use Airflow sensor
Datasheet
241In Stock
270Expected 11/25/2026
Min.: 1
Mult.: 1

Flow Meter Digital Flow Meter Air, Oxygen, Non-Aggressive Gases - 33 slm to 33 slm 10 % Bidirectional 5 V 15.6 mm, 17.8 mm Silicon
Sensirion Flow Sensors 33slm (bidirectional) Digital Flow Meter for Neonatal/Pediatric Medical Applications - Autoclavable & cleanable Version
Datasheet
20In Stock
90On Order
Min.: 1
Mult.: 1

Air Flow Sensor Air, Oxygen, Non-Aggressive Gases +/- 33 slm 3 % Bidirectional 5 V Plastic
Sensirion Flow Sensors Digital Multigas Mass Flow Meter with exchangeable connectors (6 mm Legris included). Measurement range: 2 slm - 0.002 slm.
Datasheet
2In Stock
Min.: 1
Mult.: 1

Mass Flow Meter Flow Meter Gases 2 slm 0.8 % Bidirectional 15 V to 26.4 V Aluminum
Sensirion Flow Sensors Digital Multigas Mass Flow Meter with exchangeable connectors (6 mm Legris included). Measurement range: 10 slm - 0.01 slm.
Datasheet
1In Stock
2Expected 8/26/2026
Min.: 1
Mult.: 1

Mass Flow Meter Flow Meter Gases 10 slm 0.8 % Bidirectional 15 V to 26.4 V Aluminum
Sensirion Flow Sensors Robust Digital (Mass) Flow Meter with range of -30slm to +300slm
Datasheet
5In Stock
20Expected 10/7/2026
Min.: 1
Mult.: 1

Digital Mass Flow Meter Flow Meter Air, Oxygen - 30 slm to 300 slm 3.5 % Bidirectional 3.3 V 19.8 mm Polyphenylene Ether (PPE)
Sensirion Flow Sensors
Datasheet
11On Order
Min.: 1
Mult.: 1

Mass Flow Meter Gas Air, AR, CO2, N2, N2O, O2 2 slm to 50 slm 2 % 24 V 6 mm Stainless Steel
Sensirion Flow Sensors Digital Mass Flow Meter -30slm to +300slm, robust with Heliox calibration
Datasheet
Non-Stocked Lead-Time 12 Weeks
Min.: 1
Mult.: 1

Digital Mass Flow Meter Flow Meter Air, Oxygen - 30 slm to 300 slm 3.5 % Bidirectional 3.3 V 19.8 mm Polyphenylene Ether (PPE)
Sensirion Flow Sensors Mass Flow Meter Sensor for Respiratory Applications
Datasheet
Non-Stocked Lead-Time 12 Weeks
Min.: 30
Mult.: 30

Mass Air Flow Sensor Air, Oxygen, Non-Aggressive Gases - 24 slm to 240 slm 2.5 % 2.4 V Bidirectional 5 V 14 mm
Sensirion Flow Sensors Digital Mass Flow Meter for Air, N2 0-20 slm, Downmount
Datasheet
Non-Stocked Lead-Time 12 Weeks
Min.: 40
Mult.: 40

Gas Flow Meter Air, Non-Aggressive Gases 20 L/min 3 % Bidirectional 3.5 V to 9 V Stainless Steel
Sensirion Flow Sensors Digital Mass Flow Meter for Ar, 0-20 slm, Downmount
Datasheet
Non-Stocked Lead-Time 12 Weeks
Min.: 40
Mult.: 40